%0 Journal Article
%T Nanoimprint performance improvements for high volume semiconductor device manufacturing
%A Hara, Hiromichi
%A Maruyama, Naoki
%A Hiura, Mitsuru
%A Suzaki, Yoshio
%A Kimura, Atsushi
%A Yamamoto, Kiyohito
%A Matsumoto, Takahiro
%A Yamamoto, Kenji
%A Takabayashi, Yukio
%J Proceedings of SPIE
%V 12915
%P 1291505-1291505-10
%@ 0277-786X
%D 2023-09-29
%I SPIE
%~ DeepDyve