%0 Journal Article
%T Mechanistic Study Of A Selective Gas-Phase Reactive Microlithographic System
%A Brust, T. B.
%A Turner, S. R.
%J Proceedings of SPIE
%V 771
%P 102-110
%@ 0277-786X
%D 1987-08-25
%I SPIE
%~ DeepDyve