%0 Journal Article
%T Performance of a piezo-hydraulic fine positioning device: Experimental analyses with a scaled model
%A Denkena, Berend
%A Hülsemeyer, Lars
%A Bergmeier, Maik
%J Production Engineering
%V 11
%N 5
%P 613-619
%@ 0944-6524
%D 2017-07-07
%I Springer Berlin Heidelberg
%~ DeepDyve