%0 Journal Article %T Aspects of the Conductivity Modulation Enhancement Effect in a 4500 V Planar Metal Oxide Semiconductor Device and Its Electrical Characteristics %A Kazuya Nakayama, Kazuya Nakayama %A Hideo Matsuda, Hideo Matsuda %J Japanese Journal of Applied Physics %V 37 %N 9R %@ 0021-4922 %D 1998-09-01 %~ DeepDyve