%0 Journal Article
%T Acceleration of Organic Contaminant Adsorption onto Silicon Surfaces in the Presence of Residual Fluorine
%A Saga, Koichiro
%A Hattori, Takeshi
%J Journal of the Electrochemical Society
%V 144
%N 9
%P L250-L252
%@ 0013-4651
%D 1997-09-01
%~ DeepDyve