%0 Journal Article %T Investigation of NiCr Thin Film Resistors for InP-Based Monolithic Microwave Integrated Circuits (MMICs) %A Driad, R. %A Krieg, M. %A Geldmacher, N. %A RĂ¼ster, J. %A Benkhelifa, F. %J Journal of the Electrochemical Society %V 158 %N 5 %P H561-H564 %@ 0013-4651 %D 2011-03-23 %~ DeepDyve