%0 Journal Article %T Fabrication and characterisation of RF MEMS capacitive switches tuned for X and Ku bands %A Shajahan, E.S. %A Bhat, M.S. %J International Journal of Mechatronics and Automation %V 6 %N 2-3 %P 143-149 %@ 2045-1059 %D 2018-01-01 %I Inderscience Enterprises Ltd %~ DeepDyve