%0 Journal Article
%T Measuring force uniformity during electrostatic chucking of EUVL masks
%A Sohn, Jaewoong
%A Van Peski, Chris K.
%J Proceedings of SPIE
%V 6349
%N 1
%P 63493B-63493B-11
%@ 0277-786X
%D 2006-10-06
%I SPIE
%~ DeepDyve