%0 Journal Article
%T Novel electrostatic MOEMS phase shifter array using CMOS-MEMS process
%A Chiou, Jin-Chern
%A Zheng, Wenming
%A Tsai, Zhao-Long
%J Journal of Micro/Nanolithography, MEMS and MOEMS
%V 9
%N 1
%P 013030-013030-
%@ 1932-5150
%D 2010-01-01
%I SPIE
%~ DeepDyve