%0 Journal Article
%T Picosecond laser ablation system with process control by optical coherence tomography
%A Targowski, Piotr
%A Ostrowski, Roman
%A Sylwestrzak, Marcin
%J Proceedings of SPIE
%V 7391
%N 1
%P 73910G-73910G-8
%@ 0277-786X
%D 2009-07-02
%I SPIE
%~ DeepDyve