%0 Journal Article
%T Metrology Techniques for X-ray Lithography System Characterization
%A Fay, B.
%A Nagaswami, V.
%A Tai, L.
%J Proceedings of SPIE
%V 565
%P 130-142
%@ 0277-786X
%D 1986-01-02
%I SPIE
%~ DeepDyve