%0 Journal Article
%T Fabrication of carbon nanotube field-effect transistors in commercial silicon manufacturing facilities
%A Bishop, Mindy D.
%A Hills, Gage
%A Srimani, Tathagata
%A Lau, Christian
%A Murphy, Denis
%A Fuller, Samuel
%A Humes, Jefford
%A Ratkovich, Anthony
%A Nelson, Mark
%A Shulaker, Max M.
%J Nature Electronics
%V 3
%N 8
%P 492-501
%D 2020-08-01
%I Nature Publishing Group UK
%~ DeepDyve