%0 Journal Article
%T Self‐Aligning Metallic Vertical Interconnect Access Formation through Microlensing Gas Phase Electrodeposition controlling Airgap and Morphology
%A Schlag, Leslie
%A Isaac, Nishchay A.
%A Hossain, Mohammad M.
%A Hess, Anna‐Lena
%A Wolz, Benedikt C.
%A Reiprich, Johannes
%A Ziegler, Mario
%A Pezoldt, Jörg
%A Jacobs, Heiko O.
%J Advanced Electronic Materials
%V 9
%N 1
%D 2023-01-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve