%0 Journal Article
%T In-process surface metrology for thin film flexible electronic devices
%A Blunt, Liam
%A Muhamedsalih, Hussam
%A Hassan, Mothana
%A Bird, David
%A Kolb, Dan
%A Kumar, Prashant
%A Tang, Dawei
%A Williamson, James
%J Proceedings of SPIE
%V 12490
%P 1249007-1249007-7
%@ 0277-786X
%D 2023-04-25
%I SPIE
%~ DeepDyve