%0 Journal Article
%T Evaluating investment-return-based design for AMHS in semiconductor manufacturing system
%A Hsieh, Suhua
%A Jiang, Zhen-Yi
%J Journal of Intelligent Manufacturing
%V 18
%N 6
%P 617-630
%@ 0956-5515
%D 2007-07-03
%I Springer US
%~ DeepDyve