%0 Journal Article
%T Ruthenium Films Prepared by Liquid Source Metalorganic Chemical Vapor Deposition   Using Ru(dpm)3 Dissolved with Tetrahydrofuran Solvent
%A Kadoshima, Masaru
%A Nabatame, Toshihide
%A Hiratani, Masahiko
%A Nakamura, Yoshitaka
%A Asano, Isamu
%A Suzuki, Takaaki
%J Japanese Journal of Applied Physics
%V 41
%N 3B
%@ 0021-4922
%D 2002-03-01
%~ DeepDyve