%0 Journal Article
%T Improved metal CMP endpoint control by monitoring carrier speed controller output or pad temperature
%A Beckage, Peter J.
%A Lukner, Ralf
%A Shaw, Stephen
%J Proceedings of SPIE
%V 3882
%N 1
%P 118-125
%@ 0277-786X
%D 1999-09-03
%I SPIE
%~ DeepDyve