%0 Journal Article %T Measurement of the Parameters of On-Wafer Semiconductor Devices %A Savin, A. %A Guba, V. %A Bykova, O. %J Measurement Techniques %V 59 %N 7 %P 765-772 %@ 0543-1972 %D 2016-10-27 %I Springer US %~ DeepDyve