%0 Journal Article
%T Etching of Ga2O3: an important process for device manufacturing
%A Xi, Zhaoying
%A Liu, Zeng
%A Fang, Junpeng
%A Bian, Ang
%A Zhang, Shaohui
%A Zhang, Jia-Han
%A Li, Lei
%A Guo, Yufeng
%A Tang, Weihua
%J Journal of Physics D Applied Physics
%V 57
%N 49
%P 15
%@ 0022-3727
%D 2024-12-13
%I IOP Publishing
%~ DeepDyve