%0 Journal Article
%T Single‐crystal thin‐film growth of LiNbO 3 for electrooptic modulator by rf sputtering method and its properties
%A Kamiya, Toshiharu
%A Miyazaki, Yasumitsu
%A Akao, Yasuo
%J Electrical Engineering in Japan
%V 99
%N 6
%P 1-9
%@ 0424-7760
%D 1979-01-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve