%0 Journal Article
%T Novel Approach of Semiconductor Manufacturing Process on Copper Dual Damascene Processes Integration
%A Weng, C.‐J.
%J Strain
%V 45
%N 3
%@ 0039-2103
%D 2009-06-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve