%0 Journal Article
%T Pinhole defect study and process optimization
%A Chae, Won-Hee
%A Kim, Dong-Gun
%J Proceedings of SPIE
%V 7748
%N 1
%P 774812-774812-8
%@ 0277-786X
%D 2010-05-24
%I SPIE
%~ DeepDyve