%0 Journal Article
%T The Impact of Manufacturing Imperfections on the Performance of Metalenses and a Manufacturing-Tolerant Design Method
%A Zhu, Yicheng
%A Wang, Wenjuan
%A Yu, Feilong
%A Liu, Qingquan
%A Guo, Zilu
%A Li, Guanhai
%A Chen, Pingping
%A Lu, Wei
%J Micromachines
%V 13
%N 9
%@ 2072-666X
%D 2022-09-16
%I Multidisciplinary Digital Publishing Institute
%~ DeepDyve