%0 Journal Article
%T P‐58: Accelerating Phase Shifting Technique in Quantitative Differential Interference Contrast System for Critical Dimension Measurement of TFT Substrate
%A Lin, Wen‐Chiuan
%A Yu, Sheng‐Kang
%A Lin, Shih‐Chieh
%J Sid Symposium Digest of Technical Papers
%V 43
%N 1
%@ 0097-966X
%D 2012-06-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve