%0 Journal Article
%T Self-aligned BCB planarization method for high-frequency signal injection in a VCSEL with an integrated modulator
%A Marigo-Lombart, Ludovic
%A Doucet, Jean-Baptiste
%A Lecestre, Aurélie
%A Reig, Benjamin
%A Rousset, Bernard
%A Thienpont, Hugo
%A Panajotov, Krassimir
%A Almuneau, Guilhem
%J Proceedings of SPIE
%V 9892
%P 98921R-98921R-9
%@ 0277-786X
%D 2016-04-28
%I SPIE
%~ DeepDyve