%0 Journal Article
%T An integrated digital silicon micro-accelerometer with MOSFET-type sensing elements
%A Yee, Youngjoo
%A Bu, Jong Uk
%A Chun, Kukjin
%J Journal of Micromechanics and Microengineering
%V 10
%N 3
%@ 0960-1317
%D 2000-09-01
%~ DeepDyve