%0 Journal Article
%T Double-beam laser interference lithography based on optical field modulation
%A Peng, Fuping
%A Yan, Wei
%A Yang, Fan
%A Li, Fanxing
%J Proceedings of SPIE
%V 10842
%P 108421C-108421C-5
%@ 0277-786X
%D 2019-02-06
%I SPIE
%~ DeepDyve