%0 Journal Article
%T Effect on Two-Step Polishing Process of Electrochemical Mechanical Planarization and Chemical–Mechanical Planarization on Planarization
%A Jeong, Sukhoon
%A Joo, Sukbae
%A Kim, Hyoungjae
%A Kim, Sungryul
%A Jeong, Haedo
%J Japanese Journal of Applied Physics
%V 48
%N 6R
%@ 0021-4922
%D 2009-06-01
%~ DeepDyve