%0 Journal Article
%T Impacts of process flow, scaling, and variability on interconnect performance
%A Egelhofer Ruegger, K.
%A Nanja, P.
%A Hargrove, M.
%J Proceedings of SPIE
%V 12055
%P 120550L-120550L-7
%@ 0277-786X
%D 2022-05-25
%I SPIE
%~ DeepDyve