%0 Journal Article %T Miniature electron bombardment evaporation source: evaporation rate measurement %A Nehasil, V. %A Mašek, K. %A Moreau, O. %A Matolín, V. %J Czechoslovak Journal of Physics %V 47 %N 3 %P 261-268 %@ 0011-4626 %D 2004-09-23 %I Kluwer Academic Publishers-Plenum Publishers %~ DeepDyve