%0 Journal Article
%T A machine learning approach to model the impact of line edge roughness on gate-all-around nanowire FETs while reducing the carbon footprint
%A García-Loureiro, Antonio
%A Seoane, Natalia
%A Fernández, Julián G.
%A Comesaña, Enrique
%A Pichel, Juan C.
%J PLoS ONE
%V 18
%N 7
%D 2023-07-24
%I Public Library of Science
%~ DeepDyve