%0 Journal Article
%T Surface Treatment of Flat Panel Display Substrates by a Uniform Large Area Glow Cold Plasma Tunnel at Atmospheric Pressure
%A Wang, Shouguo
%A Wan, Jun
%A Jia, Xianghong
%A Zhao, Lingli
%J Japanese Journal of Applied Physics
%V 48
%N 9R
%@ 0021-4922
%D 2009-09-01
%~ DeepDyve