%0 Journal Article
%T Fabrication and Characterization of Monolithic Integrated Three-Axis Acceleration/Pressure/Magnetic Field Sensors
%A Wang, Ying
%A Xiao, Yu
%A Zhao, Xiaofeng
%A Wen, Dianzhong
%J Micromachines
%V 15
%N 3
%@ 2072-666X
%D 2024-03-19
%I Multidisciplinary Digital Publishing Institute
%~ DeepDyve