%0 Journal Article
%T Simulation of dry e-beam etching of resist and experimental evidence
%A Rogozhin, A.
%A Sidorov, F.
%A Bruk, M.
%A Zhikharev, E.
%J Proceedings of SPIE
%V 11022
%P 110221O-110221O-5
%@ 0277-786X
%D 2019-03-15
%I SPIE
%~ DeepDyve