%0 Journal Article
%T Parallel micro manipulator for optical spot array alignment of maskless lithography
%A Li, Zheng
%A Choi, Jong
%A Ihn, Yong
%A Ji, Sang-Hoon
%A Koo, Ja
%J Microsystem Technologies
%V 21
%N 12
%P 2663-2668
%@ 0946-7076
%D 2015-05-06
%I Springer Berlin Heidelberg
%~ DeepDyve