%0 Journal Article %T Influence of the Gas Humidity on the Uniformity of RF‐Powered Atmospheric‐Pressure Low‐Temperature DBD Plasmas %A Koo, Il Gyo %A Cho, Jin Hoon %A Lee, Woong Moo %J Plasma Processes and Polymers %V 5 %N 2 %P 161-167 %@ 1612-8850 %D 2008-02-07 %I Wiley Subscription Services, Inc., A Wiley Company %~ DeepDyve