%0 Journal Article
%T Optical Characterization in Microelectronics Manufacturing
%A Perkowitz, S.
%A Seiler, D. G.
%A Duncan, W. M.
%J Journal of Research of the National Institute of Standards and Technology
%V 99
%N 5
%P 605-639
%@ 1044-677X
%D 0167-02-01
%I [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology
%~ DeepDyve