%0 Journal Article %T Self-OrganizingSub-μm Surface Structures Stimulatedby Microplasma Generated Reactive Species and Short-Pulsed Laser Irradiation %A Chur, Sascha %A Kulik, Lennart %A Schulz-von der Gathen, Volker %A Böke, Marc %A Golda, Judith %J ACS Omega %V 9 %N 27 %P 29234-29243 %D 2024-06-27 %I American Chemical Society %~ DeepDyve