%0 Journal Article
%T Phenolic molecular glasses as resists for next-generation lithography
%A André, Xavier
%A Cao, Heidi B.
%A Kudo, Hiroto
%J Proceedings of SPIE
%V 6519
%N 1
%P 65194B-65194B-10
%@ 0277-786X
%D 2007-03-16
%I SPIE
%~ DeepDyve