%0 Journal Article
%T A new approach for handling and transferring of thin semiconductor materials
%A Bagdahn, J.
%A Knoll, H.
%A Wiemer, M.
%A Petzold, M.
%J Microsystem Technologies
%V 9
%N 3
%P 204-209
%@ 0946-7076
%D 2003-01-01
%I Springer-Verlag
%~ DeepDyve