%0 Journal Article
%T Novel diaphragm microfabrication techniques for high-sensitivity biomedical fiber optic Fabry-Perot interferometric sensors
%A Poeggel, Sven
%A Tosi, Daniele
%A Duraibabu, Dineshbabu
%A Kelly, James
%A Munroe, Maria
%A Leen, Gabriel
%A Lewis, Elfed
%J Proceedings of SPIE
%V 9098
%P 909813-909813-6
%@ 0277-786X
%D 2014-06-18
%I SPIE
%~ DeepDyve