%0 Journal Article
%T Metal‐Assisted Chemical Etching of Silicon: A Review
%A Huang, Zhipeng
%A Geyer, Nadine
%A Werner, Peter
%A de Boor, Johannes
%A Gösele, Ulrich
%J Advanced Materials
%V 23
%N 2
%P 285-308
%@ 0935-9648
%D 2011-01-11
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve