%0 Journal Article
%T Investigation of the Defect Distribution of Laser Contact Opening Applied to Poly‐Si/SiNx Stacks
%A Steinhauser, Bernd
%A Arya, Varun
%A Jakob, Leonie
%A Heinz, Friedemann D.
%A Schmiga, Christian
%A Grübel, Benjamin
%A Brand, Andreas A.
%A Kluska, Sven
%A Nekarda, Jan F.
%J Physica Status Solidi (A) Applications and Materials Science
%V 219
%N 8
%@ 1862-6300
%D 2022-04-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve