%0 Journal Article
%T Materials science and fabrication processes for a new MEMS technology based on ultrananocrystalline diamond thin films
%A Auciello, Orlando
%A Birrell, James
%A Carlisle, John A
%A Gerbi, Jennifer E
%A Xiao, Xingcheng
%A Peng, Bei
%A Espinosa, Horacio D
%J Journal of Physics: Condensed Matter
%V 16
%N 16
%@ 0953-8984
%D 2004-04-28
%~ DeepDyve