%0 Journal Article
%T Characterization of Patterned Oxide Buried in Bonded Silicon-on-Insulator Wafers by Near-Infrared Scattering Topography and Microscopy
%A Wu, Xing
%A Uchikoshi, Junichi
%A Hirokane, Takaaki
%A Yamada, Ryuta
%A Takeuchi, Akihiro
%A Arima, Kenta
%A Morita, Mizuho
%J Japanese Journal of Applied Physics
%V 47
%N 4S
%@ 0021-4922
%D 2008-04-01
%~ DeepDyve