%0 Journal Article
%T Slurry Supplying Method for Large Quartz Glass Substrate Polishing
%A Khajornrungruang, Panart
%A Kimura, Keiichi
%A Yui, Ryuji
%A Wada, Nagisa
%A Suzuki, Keisuke
%J Japanese Journal of Applied Physics
%V 50
%N 5S1
%@ 0021-4922
%D 2011-05-01
%~ DeepDyve