%0 Journal Article
%T KrF excimer laser lithography with a phase‐shifting mask for gigabit‐scale ultra large scale integration
%A Imai, Akira
%J Optical Engineering
%V 35
%N 10
%P 2970-2978
%@ 0091-3286
%D 1996-10-01
%I SPIE
%~ DeepDyve