%0 Journal Article
%T Wafer Pattern Defect Detection: An Automatic Inspection Technique
%A Uchiyama, Yasushi
%A Awamura, Daikichi
%A Nakashima, Katsuyoshi
%J Proceedings of SPIE
%V 394
%P 232-238
%@ 0277-786X
%D 1983-11-07
%I SPIE
%~ DeepDyve