%0 Journal Article
%T Micro electron beam welding and laser machining – potentials of beam welding methods in the micro-system technology
%A Smolka, G.
%A Gillner, A.
%A Bosse, L.
%A Lützeler, R.
%J Microsystem Technologies
%V 10
%N 3
%P 187-192
%@ 0946-7076
%D 2003-01-01
%I Springer-Verlag
%~ DeepDyve