%0 Journal Article
%T Analytical investigation of the pull-in voltage in capacitive mechanical sensors
%A Lardiès, J.
%A Berthillier, M.
%A Bellaredj, F. M. L.
%J Proceedings of SPIE
%V 8066
%N 1
%P 80661N-80661N-10
%@ 0277-786X
%D 2011-05-04
%I SPIE
%~ DeepDyve